Dust emission testing device
New proposal for cleanliness testing: Rapid inspection of dust and adhering particles using air blow.
The particle inspection device PARTi (manufactured by PERSYS) is a newly proposed particle inspection device that can quickly inspect the cleanliness of items used in clean rooms (brought into clean rooms). It allows for the installation of precision machined parts, sample containers, cleanroom garments, gloves, and more in a dedicated chamber, where clean air that has passed through a HEPA filter is blown to remove adhering particles, and the particle count is measured using a particle counter mounted at the bottom of the device. No pre-treatment of the inspection items is necessary, and a dedicated sample fixture is included, allowing for inspections under various particle inspection conditions. Since there is no need to immerse the inspection items in liquid or rotate them in a drum, any item can be easily inspected. It is convenient for users to establish their own measurement conditions and is suitable for routine inspections. The device is available in two types according to the application: one for measuring particles from 0.1 to 5.0 μm and another for 0.3 to 5.0 μm. This particle inspection device is from a clean technology specialist company founded in 1988, which handles parts cleaning, technology development, production, and maintenance of equipment used in high-level clean rooms for the semiconductor industry, primarily centered in Silicon Valley, USA.
- 企業：東京インスツルメンツ
- 価格：Other
